US Patent 7382466 Coating for reflective optical components
Patent 7382466 was granted and assigned to Zygo on June, 2008 by the United States Patent and Trademark Office.
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Patent abstract
An optical component has a coating including one or more layers at each reflecting surface. The coating causes the optical component to have polarization eigenstates that are substantially linear and to have the properties of a half-wave plate. The coated optical component can be used in interferometry and microlithography system.
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US Patent 07382466 Coating for reflective optical components US Patent 7382466 Coating for reflective optical components
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Patent Number
0738246600
Patent Number
738246600
Edits on 29 Mar, 2023
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Infobox
Is a
Current Assignee
0
Patent Jurisdiction
Patent Number
073824660
Date of Patent
June 3, 2008
0Patent Application Number
111891020
Date Filed
July 25, 2005
0Official Website
Patent Primary Examiner
Edits on 24 Sep, 2022
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Infobox
Is a
Current Assignee
0
Patent Jurisdiction
Patent Number
073824660
Date of Patent
June 3, 2008
0Patent Application Number
111891020
Date Filed
July 25, 2005
0Official Website
Patent Primary Examiner
Edits on 17 Jun, 2022
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US Patent 07382466 Coating for reflective optical components
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07382466
Date of patent
June 3, 2008
Patent application number
11189102
Date Filed
July 25, 2005
Patent primary examiner
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