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US Patent 7399581 Photoresist topcoat for a photolithographic process

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Edits on 16 Sep, 2023
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Patent Inventor Names
Linda Karin Sundberg0
Ratnam Sooriyakumaran0
Robert David Allen0
Edits on 14 Sep, 2023
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Patent abstract

A composition that includes functionalized polyhedral oligomeric silsesquioxanes derivatives of the formulas TmR3 where m is equal to 8, 10 or 12 and QnMnR1,R2,R3 where n is equal to 8, 10 or 12 are provided. The functional groups include aqueous base soluble moieties. Mixtures of the functionalized polyhedral oligomeric silsesquioxanes derivatives are highly suitable as a topcoat for photoresist in photolithography and immersion photolithography applications.

Edits on 7 Jun, 2023
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Patent Citations Received
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US Patent 11667755 Siloxane hybrid membranes for enhanced natural gas liquid recovery
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Edits on 23 May, 2023
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edited on 23 May, 2023
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073995810
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edited on 17 May, 2023
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US Patent 07399581 Photoresist topcoat for a photolithographic process US Patent 7399581 Photoresist topcoat for a photolithographic process

Infobox
Patent Number
073995810
Patent Number
73995810
Edits on 26 Sep, 2022
"Entity importer update"
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edited on 26 Sep, 2022
Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
073995810
Date of Patent
July 15, 2008
0
Patent Application Number
110648710
Date Filed
February 24, 2005
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=073995810
Patent Primary Examiner
‌
Sin J Lee
0
Edits on 9 Jun, 2022
"Entity importer update"
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edited on 9 Jun, 2022
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=07399581
Edits on 30 Nov, 2021
"Created via: Entity Importer"
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created this topic on 30 Nov, 2021
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 US Patent 07399581 Photoresist topcoat for a photolithographic process

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
07399581
Date of patent
July 15, 2008
Patent application number
11064871
Date Filed
February 24, 2005
Patent primary examiner
‌
Sin J Lee

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