Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
November 18, 2008
Patent Application Number
09891849
Date Filed
June 25, 2001
Patent Primary Examiner
Patent abstract
An apparatus for wet processing individual wafers comprising; a means for holding the wafer; a means for providing acoustic energy to a non-device side of the wafer; and a means for flowing a fluid onto a device side of the wafer.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
