US Patent 7489837 Optical microelectromechantical structure

Patent 7489837 was granted and assigned to Huntsman on February, 2009 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Current Assignee

Huntsman

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

7489837

Date of Patent

February 10, 2009

Patent Application Number

10559310

Date Filed

June 6, 2003

Patent Primary Examiner

‌

Quyen P Leung

Patent abstract

The invention relates to an optical microelectromechanical structure (MEMS) comprising—an (at least one) optically transmissive layer (UTL)—an (at least one) intermediate layer structure (IL)—a (at least one) device layer (DL) said intermediate layer structure (IL) defining one or more optical paths (OP) between said substantially optically transmissive layer (UTL) and said device layer (DL), said intermediate structure layer (IL) defining the distance (d) between said optically transmissive layer (UTL) and said device layer (DL).

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