US Patent 7489837 Optical microelectromechantical structure
Patent 7489837 was granted and assigned to Huntsman on February, 2009 by the United States Patent and Trademark Office.
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Patent abstract
The invention relates to an optical microelectromechanical structure (MEMS) comprising—an (at least one) optically transmissive layer (UTL)—an (at least one) intermediate layer structure (IL)—a (at least one) device layer (DL) said intermediate layer structure (IL) defining one or more optical paths (OP) between said substantially optically transmissive layer (UTL) and said device layer (DL), said intermediate structure layer (IL) defining the distance (d) between said optically transmissive layer (UTL) and said device layer (DL).
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US Patent 07489837 Optical microelectromechantical structure US Patent 7489837 Optical microelectromechantical structure
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Patent Number
0748983700
Patent Number
748983700
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074898370
Date of Patent
February 10, 2009
0Patent Application Number
105593100
Date Filed
June 6, 2003
0Official Website
Patent Primary Examiner
Edits on 23 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
074898370
Date of Patent
February 10, 2009
0Patent Application Number
105593100
Date Filed
June 6, 2003
0Official Website
Patent Primary Examiner
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US Patent 07489837 Optical microelectromechantical structure
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07489837
Date of patent
February 10, 2009
Patent application number
10559310
Date Filed
June 6, 2003
Patent primary examiner
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