US Patent 7489837 Optical microelectromechantical structure
Patent 7489837 was granted and assigned to Huntsman on February, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 6, 2003
Date of Patent
February 10, 2009
Patent Application Number
10559310
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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