US Patent 7524735 Flowable film dielectric gap fill process
Patent 7524735 was granted and assigned to Novellus Systems on April, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
June 5, 2006
Date of Patent
April 28, 2009
Patent Application Number
11447594
Patent Citations Received
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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