Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Theodorus Marinus Modderman0
Date of Patent
May 5, 2009
0Patent Application Number
110157660
Date Filed
December 20, 2004
0Patent Citations Received
Patent Primary Examiner
Patent abstract
In a single or multiple stage lithography apparatus, a table provides a confining surface to a liquid supply system during, for example, substrate table exchange and/or substrate loading and unloading. In an embodiment, the table has a sensor to make a measurement of the projection beam during, for example, substrate table exchange and/or substrate loading and unloading.
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