US Patent 7528931 Lithographic apparatus and device manufacturing method
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Patent Inventor Names
Theodorus Marinus Modderman0
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Patent abstract
In a single or multiple stage lithography apparatus, a table provides a confining surface to a liquid supply system during, for example, substrate table exchange and/or substrate loading and unloading. In an embodiment, the table has a sensor to make a measurement of the projection beam during, for example, substrate table exchange and/or substrate loading and unloading.
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US Patent 07528931 Lithographic apparatus and device manufacturing method US Patent 7528931 Lithographic apparatus and device manufacturing method
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Patent Number
075289310
Patent Number
75289310
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Patent Jurisdiction
Patent Number
075289310
Date of Patent
May 5, 2009
0Patent Application Number
110157660
Date Filed
December 20, 2004
0Official Website
Patent Primary Examiner
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US Patent 07528931 Lithographic apparatus and device manufacturing method
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Is a
Patent jurisdiction
Patent number
07528931
Date of patent
May 5, 2009
Patent application number
11015766
Date Filed
December 20, 2004
Patent primary examiner
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