Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Michael A. Graf0
John Ye0
Yongzhang Huang0
Patrick Splinter0
Brian S. Freer0
Christopher Godfrey0
Date of Patent
July 7, 2009
0Patent Application Number
115433460
Date Filed
October 4, 2006
0Patent Primary Examiner
Patent abstract
A method derives a terminal return current or upstream current to adjust and/or compensate for variations in beam current during ion implantation. One or more individual upstream current measurements are obtained from a region of an ion implantation system. A terminal return current, or composite upstream current, is derived from the one or more current measurements. The terminal return current is then employed to adjust scanning or dose of an ion beam in order to facilitate beam current uniformity at a target wafer.
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