US Patent 7557363 Closed loop dose control for ion implantation
Patent 7557363 was granted and assigned to Axcelis Technologies on July, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 4, 2006
0
Date of Patent
July 7, 2009
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Patent Application Number
11543346
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Patent Inventor Names
Michael A. Graf
0
John Ye
0
Yongzhang Huang
0
Patrick Splinter
0
Brian S. Freer
0
Christopher Godfrey
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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