Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Thomas E. Drake, Jr.0
Date of Patent
November 3, 2009
0Patent Application Number
101421780
Date Filed
May 9, 2002
0Patent Primary Examiner
Patent abstract
The invention is directed to a system and method for implementing process control for temperature of a semiconductor wafer using sonic NDE techniques. The system may, for example, generate ultrasound waves in a test object during the manufacturing process. A detector such as an interferometer may be used to detect the ultrasound waves. An interpreter or analyzer may determine the temperature of the semiconductor wafer from the waves. Then, a control system may determine and implement an appropriate control action on the process.
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