US Patent 7612890 System and method for controlling wafer temperature
Patent 7612890 was granted and assigned to Lockheed Martin on November, 2009 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
May 9, 2002
0
Date of Patent
November 3, 2009
0
Patent Application Number
10142178
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Patent Inventor Names
Thomas E. Drake, Jr.
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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