Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Date of Patent
March 23, 2010
Patent Application Number
11538732
Date Filed
October 4, 2006
Patent Primary Examiner
Patent abstract
In accordance with the invention, a surface capacitive sensor is mechanically coupled to a conventional macrostructure actuator to measure the displacement of the actuator along a measurement axis with high accuracy.
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