US Patent 7683634 Micromachined capacitive sensor and linkage
Patent 7683634 was granted and assigned to Agilent Technologies on March, 2010 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 4, 2006
Date of Patent
March 23, 2010
Patent Application Number
11538732
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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