US Patent 7683634 Micromachined capacitive sensor and linkage
Patent 7683634 was granted and assigned to Agilent Technologies on March, 2010 by the United States Patent and Trademark Office.
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Patent abstract
In accordance with the invention, a surface capacitive sensor is mechanically coupled to a conventional macrostructure actuator to measure the displacement of the actuator along a measurement axis with high accuracy.
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US Patent 07683634 Micromachined capacitive sensor and linkage US Patent 7683634 Micromachined capacitive sensor and linkage
Infobox
Patent Number
0768363400
Patent Number
768363400
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076836340
Date of Patent
March 23, 2010
0Patent Application Number
115387320
Date Filed
October 4, 2006
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Current Assignee
Patent Jurisdiction
Patent Number
076836340
Date of Patent
March 23, 2010
0Patent Application Number
115387320
Date Filed
October 4, 2006
0Official Website
Patent Primary Examiner
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US Patent 07683634 Micromachined capacitive sensor and linkage
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
07683634
Date of patent
March 23, 2010
Patent application number
11538732
Date Filed
October 4, 2006
Patent primary examiner
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