Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yongli Huang0
Date of Patent
July 20, 2010
0Patent Application Number
116966520
Date Filed
April 4, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A capacitive micromachined ultrasonic transducer (cMUT) has an acoustic decoupling feature. A cavity is introduced underneath the regular cMUT element, preferably in the substrate, to provide acoustic decoupling. Trenches are also introduced to separate the cMUT elements and to provide further acoustic decoupling. The acoustic decoupling feature may be used in both conventional membrane-based cMUT and the newer embedded-spring cMUT (ESCMUT). Exemplary fabrication methods are also described.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
