US Patent 7767024 Method for front end of line fabrication
Is a
Date Filed
June 6, 2008
Date of Patent
August 3, 2010
Patent Application Number
12134715
Patent Inventor Names
Joel M. Huston
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Chien-Teh Kao
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Chiukin (Steven) Lai
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Jing-Pei (Connie) Chou
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Xiaoxiong (John) Yuan
0
Xinliang Lu
0
Yu Chang
0
Mei Chang
0
Sal Umotoy
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See-Eng Phan
0
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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