US Patent 7882456 Optical lithography correction process
Patent 7882456 was granted and assigned to Cadence Design Systems on February, 2011 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
April 9, 2005
Date of Patent
February 1, 2011
Patent Application Number
11101872
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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