Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dirk Hammerschmidt0
Date of Patent
April 5, 2011
0Patent Application Number
123648840
Date Filed
February 3, 2009
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a diaphragm, a sensing element, and a circuit. The sensing element is configured to sense deflection of the diaphragm. The circuit is configured to heat the diaphragm to induce deflection of the diaphragm.
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