Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Li-Ken Yeh0
I-Hsiang Chiu0
Date of Patent
May 3, 2011
0Patent Application Number
118457800
Date Filed
August 27, 2007
0Patent Primary Examiner
Patent abstract
A micro electromechanical system and a fabrication method thereof, which has trenches formed on a substrate to prevent circuits from interfering each other, and to prevent over-etching of the substrate when releasing a microstructure.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.
