US Patent 7935556 Microelectromechanical system and process of making the same
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Patent abstract
A micro electromechanical system and a fabrication method thereof, which has trenches formed on a substrate to prevent circuits from interfering each other, and to prevent over-etching of the substrate when releasing a microstructure.
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Patent Inventor Names
I-Hsiang Chiu0
Li-Ken Yeh0
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US Patent 07935556 Microelectromechanical system and process of making the same US Patent 7935556 Microelectromechanical system and process of making the same
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Patent Number
079355560
Patent Number
79355560
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Official Website
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Patent Jurisdiction
Patent Number
079355560
Date of Patent
May 3, 2011
0Patent Application Number
118457800
Date Filed
August 27, 2007
0Official Website
Patent Primary Examiner
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US Patent 07935556 Microelectromechanical system and process of making the same
Infobox
Is a
Patent jurisdiction
Patent number
07935556
Date of patent
May 3, 2011
Patent application number
11845780
Date Filed
August 27, 2007
Patent primary examiner
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