US Patent 7935556 Microelectromechanical system and process of making the same
Is a
Date Filed
August 27, 2007
0
Date of Patent
May 3, 2011
0
Patent Application Number
11845780
0
Patent Inventor Names
Li-Ken Yeh
0
I-Hsiang Chiu
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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