Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Sunity K. Sharma0
Jaspreet Singh Dhau0
Date of Patent
August 2, 2011
0Patent Application Number
121437370
Date Filed
June 20, 2008
0Patent Primary Examiner
Patent abstract
A method for reducing porosity of metal layers on a substrate may comprise depositing a precursor onto at least a portion of the substrate, and adding metal layers over the precursor comprising at least one cycle, wherein each cycle comprises: depositing a metal layer over the precursor, and exposing the metal layer to a breath-out solution.
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