US Patent 8119527 Depositing tungsten into high aspect ratio features
Patent 8119527 was granted and assigned to Novellus Systems on February, 2012 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 4, 2009
0
Date of Patent
February 21, 2012
0
Patent Application Number
12535464
0
Patent Citations Received
Patent Inventor Names
Michal Danek
0
Raashina Humayun
0
Sean Chang
0
Aaron R. Fellis
0
Anand Chadrashekar
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
Find more entities like US Patent 8119527 Depositing tungsten into high aspect ratio features
Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
