US Patent 8318575 Compressive polycrystalline silicon film and method of manufacture thereof
Patent 8318575 was granted and assigned to Infineon Technologies on November, 2012 by the United States Patent and Trademark Office.
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Patent Inventor Names
Markus Meyer0
Stefan Pompl0
Wolfgang Lehnert0
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US Patent 08318575 Compressive polycrystalline silicon film and method of manufacture thereof US Patent 8318575 Compressive polycrystalline silicon film and method of manufacture thereof
Infobox
Patent Number
08318575
Patent Number
8318575
Edits on 15 Dec, 2021
Golden AI
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US Patent 08318575 Compressive polycrystalline silicon film and method of manufacture thereof
Infobox
Is a
Current assignee
Patent jurisdiction
Patent number
08318575
Date of patent
November 27, 2012
Patent application number
13022411
Date Filed
February 7, 2011
Patent primary examiner
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