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US Patent 8395217 Isolation in CMOSFET devices utilizing buried air bags
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Patent
Date Filed
October 27, 2011
Date of Patent
March 12, 2013
Patent Application Number
13283031
Patent Citations Received
US Patent 11764258 Airgap isolation structures
US Patent 11881506 Gate structures with air gap isolation features
0
US Patent 11837643 Method for manufacturing memory device
0
Patent Jurisdiction
United States Patent and Trademark Office
Patent Number
8395217
Patent Primary Examiner
Tuan N. Quach
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