US Patent 8808561 Inert-dominant pulsing in plasma processing systems
Patent 8808561 was granted and assigned to Lam Research on August, 2014 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
July 16, 2012
0
Date of Patent
August 19, 2014
0
Patent Application Number
13550547
0
Patent Citations Received
Patent Inventor Names
Keren Jacobs Kanarik
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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