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US Patent 8846163 Method for removing oxides

Patent 8846163 was granted and assigned to Applied Materials on September, 2014 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

88461630

Patent Inventor Names

Jing-Pei (Connie) Chou0

Chien-Teh Kao0

Chiukin (Steven) Lai0

Joel M. Huston0

Mei Chang0

Sal Umotoy0

See-Eng Phan0

Son Trinh0

...

Date of Patent

September 30, 2014

Patent Application Number

134891370

Date Filed

June 5, 2012

Patent Citations Received

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US Patent 11697877 High temperature face plate for deposition application

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US Patent 11781212 Overlap susceptor and preheat ring

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US Patent 11915950 Multi-zone semiconductor substrate supports

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US Patent 12009228 Low temperature chuck for plasma processing systems

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US Patent 11684941 Showerhead with embedded nut

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US Patent 11682560 Systems and methods for hafnium-containing film removal

Patent Primary Examiner

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Michael Wieczorek

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