US Patent 8846491 Forming a diffusion break during a RMG process
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Patent Inventor Names
Andy Wei0
Daniel Pham0
Nicholas V. LiCausi0
Zhenyu Hu0
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US Patent 08846491 Forming a diffusion break during a RMG process US Patent 8846491 Forming a diffusion break during a RMG process
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Patent Number
08846491
Patent Number
8846491
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US Patent 08846491 Forming a diffusion break during a RMG process
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Is a
Patent jurisdiction
Patent number
08846491
Date of patent
September 30, 2014
Patent application number
13921377
Date Filed
June 19, 2013
Patent primary examiner
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