Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
July 21, 2015
Patent Application Number
13930187
Date Filed
June 28, 2013
Patent Citations Received
Patent Primary Examiner
Patent abstract
A semiconductor device includes a lower conductor having a lower conductor sidewall, a barrier film having a barrier film sidewall formed directly on the lower conductor sidewall, and a via formed on a top surface of the lower conductor. A top portion of the barrier film sidewall is recessed, such that a top surface of the barrier film sidewall is at a level lower than the top surface of the lower conductor.
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