US Patent 9087844 Semiconductor device and fabricating method thereof
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Patent abstract
A semiconductor device includes a lower conductor having a lower conductor sidewall, a barrier film having a barrier film sidewall formed directly on the lower conductor sidewall, and a via formed on a top surface of the lower conductor. A top portion of the barrier film sidewall is recessed, such that a top surface of the barrier film sidewall is at a level lower than the top surface of the lower conductor.
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US Patent 09087844 Semiconductor device and fabricating method thereof US Patent 9087844 Semiconductor device and fabricating method thereof
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Patent Number
0908784400
Patent Number
908784400
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Patent Jurisdiction
Patent Number
090878440
Date of Patent
July 21, 2015
0Patent Application Number
139301870
Date Filed
June 28, 2013
0Official Website
Patent Primary Examiner
Edits on 27 Sep, 2022
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Infobox
Is a
Patent Jurisdiction
Patent Number
090878440
Date of Patent
July 21, 2015
0Patent Application Number
139301870
Date Filed
June 28, 2013
0Official Website
Patent Primary Examiner
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US Patent 09087844 Semiconductor device and fabricating method thereof
Infobox
Is a
Patent jurisdiction
Patent number
09087844
Date of patent
July 21, 2015
Patent application number
13930187
Date Filed
June 28, 2013
Patent primary examiner
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