Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
September 22, 2015
Patent Application Number
13450223
Date Filed
April 18, 2012
Patent Citations Received
Patent Primary Examiner
Patent abstract
A microelectromechanical system (MEMS) device may include a MEMS structure above a first substrate. The MEMS structure comprising a central static element, a movable element, and an outer static element. A portion of bonding material between the central static element and the first substrate. A second substrate above the MEMS structure, with a portion of a dielectric layer between the central static element and the second substrate. A supporting post comprises the portion of bonding material, the central static element, and the portion of dielectric material.
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