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US Patent 9139420 MEMS device structure and methods of forming same

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Patent Citations Received
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US Patent 11841561 Silicon photonic device with backup light paths
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US Patent 11837517 Packaged semiconductor devices with wireless charging means
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Patent abstract

A microelectromechanical system (MEMS) device may include a MEMS structure above a first substrate. The MEMS structure comprising a central static element, a movable element, and an outer static element. A portion of bonding material between the central static element and the first substrate. A second substrate above the MEMS structure, with a portion of a dielectric layer between the central static element and the second substrate. A supporting post comprises the portion of bonding material, the central static element, and the portion of dielectric material.

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Patent Citations Received
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US Patent 11776881 Semiconductor device and method
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US Patent 11767216 Semiconductor MEMS structure
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=09139420
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US Patent 09139420 MEMS device structure and methods of forming same US Patent 9139420 MEMS device structure and methods of forming same

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Patent Number
09139420
Patent Number
9139420
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09139420
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 US Patent 09139420 MEMS device structure and methods of forming same

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09139420
Date of patent
September 22, 2015
Patent application number
13450223
Date Filed
April 18, 2012
Patent primary examiner
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Michael Lebentritt

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