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US Patent 9230941 Bonding structure for stacked semiconductor devices

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Contents

Is a
Patent
Patent

Patent attributes

Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
9230941
Patent Inventor Names
Szu-Ying Chen0
Dun-Nian Yaung0
Date of Patent
January 5, 2016
Patent Application Number
14229114
Date Filed
March 28, 2014
Patent Citations Received
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US Patent 12136605 Layer structures for making direct metal-to-metal bonds at low temperatures in microelectronics and method for forming the same
0
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US Patent 12080672 Direct gang bonding methods including directly bonding first element to second element to form bonded structure without adhesive
0
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US Patent 12113056 Stacked dies and methods for forming bonded structures
0
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US Patent 12113054 Non-volatile dynamic random access memory
0
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US Patent 12125784 Interconnect structures
0
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US Patent 12132020 Low temperature bonded structures
0
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US Patent 11710718 Structures and methods for low temperature bonding using nanoparticles
0
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US Patent 11715730 Direct-bonded LED arrays including optical elements configured to transmit optical signals from LED elements
0
...
Patent Primary Examiner
‌
Nathan Ha
Patent abstract

A semiconductor device, and a method of fabrication, is introduced. In an embodiment, one or more passivation layers are formed over a first substrate. Recesses are formed in the passivation layers and a first bonding pad, a second bonding pad, and a first via are formed in the recesses. In some embodiment, the first via may have electrical contact with the first bonding pad and may provide an electrical pathway to a first plurality of metallization layers. The first bonding pad and the second bonding pad in the first substrate are aligned to a third bonding pad and the fourth bonding pad in a second substrate and may be bonded using a direct bonding method. A bond between the first bonding pad and the third bonding pad may provide an electrical pathway between devices on the first substrate and devices on the second substrate.

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