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US Patent 9233839 MEMS device and method of forming the same

Patent 9233839 was granted and assigned to Taiwan Semiconductor Manufacturing Company on January, 2016 by the United States Patent and Trademark Office.

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Patent

Patent attributes

Patent Applicant

Taiwan Semiconductor Manufacturing Company

Current Assignee

Taiwan Semiconductor Manufacturing Company

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

9233839

Date of Patent

January 12, 2016

Patent Application Number

13956457

Date Filed

August 1, 2013

Patent Citations Received

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US Patent 11841561 Silicon photonic device with backup light paths

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US Patent 11767216 Semiconductor MEMS structure

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US Patent 11776881 Semiconductor device and method

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US Patent 11837517 Packaged semiconductor devices with wireless charging means

Patent Primary Examiner

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Tran Tran

Patent abstract

A method for forming a MEMS device is provided. The method includes the following steps of providing a substrate having a first portion and a second portion; fabricating a membrane type sensor on the first portion of the substrate; and fabricating a bulk silicon sensor on the second portion of the substrate.

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