US Patent 9233839 MEMS device and method of forming the same
Patent 9233839 was granted and assigned to Taiwan Semiconductor Manufacturing Company on January, 2016 by the United States Patent and Trademark Office.
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Patent abstract
A method for forming a MEMS device is provided. The method includes the following steps of providing a substrate having a first portion and a second portion; fabricating a membrane type sensor on the first portion of the substrate; and fabricating a bulk silicon sensor on the second portion of the substrate.
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US Patent 09233839 MEMS device and method of forming the same US Patent 9233839 MEMS device and method of forming the same
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Patent Number
0923383900
Patent Number
923383900
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Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
092338390
Date of Patent
January 12, 2016
0Patent Application Number
139564570
Date Filed
August 1, 2013
0Official Website
Patent Primary Examiner
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Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
092338390
Date of Patent
January 12, 2016
0Patent Application Number
139564570
Date Filed
August 1, 2013
0Official Website
Patent Primary Examiner
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US Patent 09233839 MEMS device and method of forming the same
Infobox
Is a
Patent applicant
Current assignee
Patent jurisdiction
Patent number
09233839
Date of patent
January 12, 2016
Patent application number
13956457
Date Filed
August 1, 2013
Patent primary examiner
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