Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kim Phan Le0
Willem Frederik Adrianus Besling0
Date of Patent
July 5, 2016
0Patent Application Number
140343460
Date Filed
September 23, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.
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