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US Patent 9383285 MEMS resonator pressure sensor

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Patent abstract

A resonant MEMS pressure sensor in which the resonator mass of the MEMS resonator is anchored both to the fixed base beneath the resonator cavity as well as to the top membrane over the resonator cavity. This provides a more robust fixing of the resonator mass and offers a dependence of resonant frequency on the pressure outside the cavity.

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Patent Citations Received
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US Patent 11787688 Methods of forming MEMS diaphragms including corrugations
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Patent Citations Received
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US Patent 11780726 Dual-diaphragm assembly having center constraint
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Patent Citations Received
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US Patent 11772961 MEMS device with perimeter barometric relief pierce
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Patent Inventor Names
Kim Phan Le0
Willem Frederik Adrianus Besling0
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US Patent 09383285 MEMS resonator pressure sensor US Patent 9383285 MEMS resonator pressure sensor

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Patent Number
093832850
Patent Number
93832850
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Official Website
https://pdfpiw.uspto.gov/.piw?Docid=093832850
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Infobox
Is a
Patent
Patent
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
093832850
Date of Patent
July 5, 2016
0
Patent Application Number
140343460
Date Filed
September 23, 2013
0
Official Website
https://pdfpiw.uspto.gov/.piw?Docid=093832850
Patent Primary Examiner
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Lisa Caputo
0
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Website URL
https://pdfpiw.uspto.gov/.piw?Docid=09383285
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 US Patent 09383285 MEMS resonator pressure sensor

Infobox
Is a
Patent
Patent
Patent jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent number
09383285
Date of patent
July 5, 2016
Patent application number
14034346
Date Filed
September 23, 2013
Patent primary examiner
‌
Lisa Caputo

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