Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Nader Shamma0
Shankar Swaminathan0
Adrien LaVoie0
Frank L. Pasquale0
Girish Dixit0
Date of Patent
July 12, 2016
0Patent Application Number
141943240
Date Filed
February 28, 2014
0Patent Citations Received
0
Patent Primary Examiner
Patent abstract
Methods for depositing nanolaminate protective layers over a core layer to enable deposition of high quality conformal films over the core layer for use in advanced multiple patterning schemes are provided. In certain embodiments, the methods involve depositing a thin silicon oxide or titanium oxide film using plasma-based atomic layer deposition techniques with a low high frequency radio frequency (HFRF) plasma power, followed by depositing a conformal titanium oxide film or spacer with a high HFRF plasma power.
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