US Patent 9436990 Defect observation method and device therefor
Patent 9436990 was granted and assigned to Hitachi on September, 2016 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
October 22, 2012
Date of Patent
September 6, 2016
Patent Applicant
Patent Application Number
14367186
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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