Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Jereld Lee Winkler0
Date of Patent
November 1, 2016
0Patent Application Number
137913390
Date Filed
March 8, 2013
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A system and method for providing pulsed excited species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control device to control a pressure at the remote plasma unit as reactive species from the remote plasma unit are pulsed to the reaction chamber.
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