Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
February 14, 2017
Patent Application Number
14834505
Date Filed
August 25, 2015
Patent Citations Received
Patent Primary Examiner
Patent abstract
Provided is a deposition apparatus including a connection channel connecting a gas inflow channel and a gas outflow channel so as to increase cleaning efficiency by providing a portion of cleaning gas to the dead space of the gas inflow channel and controlling a flow of a cleaning gas.
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