US Patent 9627511 Vertical transistor having uniform bottom spacers
Is a
Date Filed
June 21, 2016
Date of Patent
April 18, 2017
Patent Application Number
15188476
Patent Inventor Names
Kangguo Cheng
0
Geng Wang
0
Juntao Li
0
Qintao Zhang
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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