Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kazutami Tago0
Toshiyuki Yokosuka0
Hideyuki Kazumi0
Minoru Yamazaki0
Date of Patent
May 2, 2017
0Patent Application Number
135802880
Date Filed
February 9, 2011
0Patent Citations Received
Patent Primary Examiner
Patent abstract
The present invention has for its object to provide a charged particle beam irradiation method and a charged particle beam apparatus which can suppress unevenness of electrification even when a plurality of different kinds of materials are contained in a pre-dosing area or degrees of density of patterns inside the pre-dosing area differs with positions.
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