US Patent 9640366 Electron beam irradiation method and scanning electron microscope
Patent 9640366 was granted and assigned to Hitachi on May, 2017 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
February 9, 2011
0
Date of Patent
May 2, 2017
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Patent Application Number
13580288
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Patent Citations Received
Patent Inventor Names
Kazutami Tago
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Toshiyuki Yokosuka
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Hideyuki Kazumi
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Minoru Yamazaki
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Patent Jurisdiction
Patent Number
Patent Primary Examiner
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