US Patent 9684234 Sequential infiltration synthesis for enhancing multiple-patterning lithography
Is a
Date Filed
May 24, 2013
0
Date of Patent
June 20, 2017
0
Patent Application Number
13902169
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Patent Citations Received
Patent Inventor Names
Jeffrey W. Elam
0
Yu-Chih Tseng
0
Seth B. Darling
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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