Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Elisabeth Corinne Rodenburg0
Raymond Wilhelmus Louis Lafarre0
Sjoerd Nicolaas Lambertus Donders0
Yogesh Pramod Karade0
Nicolaas Ten Kate0
Nina Vladimirovna Dziomkina0
Date of Patent
August 22, 2017
Patent Application Number
15296968
Date Filed
October 18, 2016
Patent Citations Received
Patent Primary Examiner
Patent abstract
An object holder for a lithographic apparatus has a main body having a surface. A plurality of burls to support an object is formed on the surface or in apertures of a thin-film stack. At least one of the burls is formed by laser-sintering. At least one of the burls formed by laser-sintering may be a repair of a damaged burl previously formed by laser-sintering or another method.
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