Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Satish Achanta0
Benjamin David Dawson0
Matthew Lipson0
Tammo Uitterdijk0
Matthew Anthony Sorna0
Iliya Sigal0
Date of Patent
May 21, 2024
0Patent Application Number
176126790
Date Filed
May 5, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
A substrate table for supporting a substrate includes a surface and coarse burls. Each of the coarse burls includes a burl-top surface and fine burls. The coarse burls are disposed on the surface of the substrate table. The fine burls are disposed on the burl-top surface. The fine burls contact the substrate when the substrate table supports the substrate.
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