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US Patent 11988971 Lithographic apparatus, substrate table, and method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
May 5, 2020
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Date of Patent
May 21, 2024
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Patent Application Number
17612679
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Patent Citations
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US Patent 8318288 Optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby
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US Patent 9737934 Substrate holder and method of manufacturing a substrate holder
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US Patent 10241418 Method and apparatus for obtaining diagnostic information relating to a lithographic manufacturing process, lithographic processing system including diagnostic apparatus
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US Patent 10018924 Substrate holder, lithographic apparatus, device manufacturing method, and method of manufacturing a substrate holder
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US Patent 10453734 Substrate holder, a lithographic apparatus and method of manufacturing devices
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US Patent 7511799 Lithographic projection apparatus and a device manufacturing method
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US Patent 7816022 Composite structure for microlithography and optical arrangement
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Patent Inventor Names
Satish Achanta
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Benjamin David Dawson
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Matthew Lipson
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Tammo Uitterdijk
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Matthew Anthony Sorna
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Iliya Sigal
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11988971
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Patent Primary Examiner
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Hung V Nguyen
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CPC Code
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G03F 7/708
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B05D 3/06
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B05D 5/00
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B22F 7/062
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B22F 10/25
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B22F 10/28
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B22F 10/66
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B23Q 3/18
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Y02P 10/25
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G03F 7/70733
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